Design of sphere seeds for glancing angle deposition

Glancing angle deposition (GLAD) is a specific type of physical vapor that has the unique ability to generate three-dimensional nanofeatures in process-efficient and low-cost manner. Our research group previously demonstrated how line seeds can be strategically implemented create variety novel well-organized nanostructures. In this paper we explore use spherical self-assemble into hexagonally close packed patterns for GLAD seeding. This bottom-up approach cost-effective efficient seeding, no top-down nanofabrication technique needed. Although seeding theories appropriate are necessary, little theory been proposed literature three dimensional seeds, yet most used 3D surfaces. paper, introduce scheme derive an analytical model diameter nanopillars percent coverage given process parameters sphere incident angle. The design while validate designs as function Experimentally, depends mostly on angle, changing only minor effect. nanopillar decreases increases. For example, smaller than 100 nm grown from 200 spheres when at least 85°. Spherical creating hexagonal periodic nanostructures, which have applications optics biology.